Valve with Soft-Pump Function - Series 29
For reduced turbulence during initial pump down

The latest developments in the semiconductor industry demand controllable pump-down sequences where minimal turbulences, low particle count and reproducibility of the flow are a must. To meet these requirements, appropriate valves in the pump lines are essential.

VAT's new Series 29 valve, featuring a sophisicated soft-pump system, is ideal for this purpose. See for yourself its excellent performance.

Outstanding properties are:

• absolute scale for flow adjustment
• easy, fast, precise and repeatable adjustment
• competitive price
• easy servicing with no adjustment required

The pictures below illustrate how turbulence generation can be influenced with the orifice used in the valve. The smaller the orifice opening, the lower the turbulence generation.

Valve DN 40 fully open	Valve DN 40 with max. orifice opening	Valve DN 40 with min. orifice opening
Video	Video	Video

Vacuum Valves Veries 24
	With shaft feedthrough for large gas flows

HV Valves Veries 26
	With bellows feedthrough

UHV Valves Veries 28
	For extremely low outgassing rates also suited for most corrosive gases

XHV Valves Veries 54
	(Extreme UHV) Bakeable to 300°C open/closed

XH Valves Veries 57
	(Extreme UHV) Bakeable to 450°C open/350°C closed

 Details