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Valve with Soft-Pump Function - Series 29
For reduced turbulence during initial pump down
The latest developments in the semiconductor industry demand controllable pump-down sequences where minimal turbulences, low particle count and reproducibility of the flow are a must. To meet these requirements, appropriate valves in the pump lines are essential.
VAT's new Series 29 valve, featuring a sophisicated soft-pump system, is ideal for this purpose. See for yourself its excellent performance.
Outstanding properties are:
- absolute scale for flow adjustment
- easy, fast, precise and repeatable adjustment
- competitive price
- easy servicing with no adjustment required
The pictures below illustrate how turbulence generation can be influenced with the orifice used in the valve. The smaller the orifice opening, the lower the turbulence generation.
| Valve DN 40 fully open |
Valve DN 40 with max. orifice opening |
Valve DN 40 with min. orifice opening |
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| Vacuum Valves Veries 24 |
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With shaft feedthrough for large gas flows
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| HV Valves Veries 26 |
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With bellows feedthrough
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| UHV Valves Veries 28 |
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For extremely low outgassing rates also suited for most corrosive gases |
| XHV Valves Veries 54 |
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(Extreme UHV) Bakeable to 300°C open/closed |
| XH Valves Veries 57 |
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(Extreme UHV) Bakeable to 450°C open/350°C closed | Details |